Inventor
GROMER OSWALD
DE7 patents
⚠️ This page may combine multiple inventors who share the name “GROMER OSWALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
2 patentsUS7408631B2Aug 5, 2008
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask
ZEISS CARL SMT AG9 citations82
US7755748B2Jul 13, 2010
Device and method for range-resolved determination of scattered light, and an illumination mask
ZEISS CARL SMT AG4 citations61