Inventor
MATTIZA DIANA
DE2 patents
Patents
2 patentsUS6980304B2Dec 27, 2005
Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument
INFINEON TECHNOLOGIES AG2 citations56
US7245351B2Jul 17, 2007
Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool
INFINEON TECHNOLOGIES AG3 citations52