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Inventor
LEPUSCHENKO WALTER VICTOR
US
2 patents
Patents
2 patents
US8377722B2
Feb 19, 2013
Methods of forming structures with a focused ion beam for use in atomic force probing and structures for use in atomic force probing
IBM
6 citations
70
US7935604B2
May 3, 2011
Method of making small geometry features
IBM
0 citations
46