Inventor
HOEFNAGELS JOHAN CHRISTIAAN GERARD
NL5 patents
⚠️ This page may combine multiple inventors who share the name “HOEFNAGELS JOHAN CHRISTIAAN GERARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7511797B2Mar 31, 2009
Lithography system, control system and device manufacturing method
ASML NETHERLANDS BV9 citations82
US7477403B2Jan 13, 2009
Optical position assessment apparatus and method
ASML NETHERLANDS BV8 citations82
US7561251B2Jul 14, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations79
US7538855B2May 26, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51