Inventor

KIM SAM HYUNG SAM

KR2 patents

Patents

2 patents

US9564286B2Feb 7, 2017

Method of forming thin film of semiconductor device

SAMSUNG ELECTRONICS CO LTD3 citations67

US9105581B2Aug 11, 2015

Method of processing a substrate and apparatus for performing the same

SAMSUNG ELECTRONICS CO LTD3 citations57