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Inventor
AUFEGGER CHRISTIAN
AT
2 patents
⚠️ This page may combine multiple inventors who share the name “AUFEGGER CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LACH OTTO
1 patent
US9484229B2
Nov 1, 2016
Device and method for processing wafer-shaped articles
LACH OTTO
5 citations
62
PLAZONIC ANTE
1 patent
US8899246B2
Dec 2, 2014
Device and method for processing wafer shaped articles
PLAZONIC ANTE
5 citations
61