Inventor

SHIFRIN EUGENE

US29 patents

⚠️ This page may combine multiple inventors who share the name “SHIFRIN EUGENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIFRIN EUGENE

KLA TENCOR CORP

Continuous-wave laser-sustained plasma illumination source

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Inspection recipe setup from reference image variation

High sensitivity repeater defect detection

Wafer inspection using free-form care areas

Detecting defects on a wafer

High efficiency laser-sustained plasma light source

Continuous-wave laser-sustained plasma illumination source

Array mode repeater detection

System and method for separation of pump light and collected light in a laser pumped light source

System and method for enhanced defect detection with a digital matched filter

Defect detection using structural information

Repeater detection

Repeater defect detection

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination

Repeater defect detection

System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer

Differential imaging for single-path optical wafer inspection

Neutral atom imaging system

System and method for separation of pump light and collected light in a laser pumped light source

System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer

KLA TENCOR TECH CORP

Methods and systems for determining a position of inspection data in design data space

Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer

KLA CORP

High efficiency laser-sustained plasma light source with collection of broadband radiation

Print check repeater defect detection

BEZEL ILYA V

Multi-wavelength pumping to sustain hot plasma

CHEN CHIEN-HUEI ADAM

Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer

MAHADEVAN MOHAN

Automated inspection scenario generation