Inventor
KULKARNI ASHOK V
US14 patents
⚠️ This page may combine multiple inventors who share the name “KULKARNI ASHOK V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9098891B2Aug 4, 2015
Adaptive sampling for semiconductor inspection recipe creation, defect review, and metrology
KLA TENCOR CORP27 citations92
US7440607B1Oct 21, 2008
Outlier substrate inspection
KLA TENCOR CORP45 citations89
US9401016B2Jul 26, 2016
Using high resolution full die image data for inspection
KLA TENCOR CORP15 citations83
US9262821B2Feb 16, 2016
Inspection recipe setup from reference image variation
KLA TENCOR CORP8 citations83
US9224660B2Dec 29, 2015
Tuning wafer inspection recipes using precise defect locations
KLA TENCOR CORP7 citations83
US9767548B2Sep 19, 2017
Outlier detection on pattern of interest image populations
KLA TENCOR CORP1 citations51
US10706522B2Jul 7, 2020
System and method for generation of wafer inspection critical areas
KLA TENCOR CORP0 citations47