Inventor
CHEN CHIEN-HUEI ADAM
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHIEN-HUEI ADAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS9262821B2Feb 16, 2016
Inspection recipe setup from reference image variation
KLA TENCOR CORP8 citations83
US8000922B2Aug 16, 2011
Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
KLA TENCOR CORP16 citations82
US10482590B2Nov 19, 2019
Method and system for defect classification
KLA TENCOR CORP11 citations80
US9898811B2Feb 20, 2018
Method and system for defect classification
KLA TENCOR CORP4 citations71
US9489599B2Nov 8, 2016
Decision tree construction for automatic classification of defects on semiconductor wafers
KLA TENCOR CORP0 citations36
CHEN CHIEN-HUEI ADAM
3 patentsUS8135204B1Mar 13, 2012
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe
CHEN CHIEN-HUEI ADAM33 citations89
US8139844B2Mar 20, 2012
Methods and systems for determining a defect criticality index for defects on wafers
CHEN CHIEN-HUEI ADAM11 citations82
US8213705B2Jul 3, 2012
Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer
CHEN CHIEN-HUEI ADAM1 citations49
KULKARNI ASHOK V
2 patentsKLA TENCOR TECH CORP
2 patentsUS7925072B2Apr 12, 2011
Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods
KLA TENCOR TECH CORP11 citations81
US7894659B2Feb 22, 2011
Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer
KLA TENCOR TECH CORP3 citations61