Inventor
KVAMME DAMON F
US19 patents
⚠️ This page may combine multiple inventors who share the name “KVAMME DAMON F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS7352457B2Apr 1, 2008
Multiple beam inspection apparatus and method
KLA TENCOR CORP66 citations97
US6636301B1Oct 21, 2003
Multiple beam inspection apparatus and method
KLA TENCOR CORP113 citations97
US6646281B1Nov 11, 2003
Differential detector coupled with defocus for improved phase defect sensitivity
KLA TENCOR CORP11 citations73
US11112691B2Sep 7, 2021
Inspection system with non-circular pupil
KLA TENCOR CORP2 citations69
US10168273B1Jan 1, 2019
Methods and apparatus for polarizing reticle inspection
KLA TENCOR CORP5 citations68
US9151718B2Oct 6, 2015
Illumination system with time multiplexed sources for reticle inspection
KLA TENCOR CORP0 citations51
KLA INSTR CORP
3 patentsKLA TENCOR TECH CORP
3 patentsUS6879390B1Apr 12, 2005
Multiple beam inspection apparatus and method
KLA TENCOR TECH CORP55 citations95
US6727512B2Apr 27, 2004
Method and system for detecting phase defects in lithographic masks and semiconductor wafers
KLA TENCOR TECH CORP27 citations92
US7292393B2Nov 6, 2007
Variable illuminator and speckle buster apparatus
KLA TENCOR TECH CORP11 citations84