Inventor
PALMER RICHARD EDWARD
GB8 patents
⚠️ This page may combine multiple inventors who share the name “PALMER RICHARD EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV BIRMINGHAM
4 patentsUS8034546B2Oct 11, 2011
Use of methanofullerne derivatives as resist materials and method for forming a resist layer
UNIV BIRMINGHAM10 citations81
US6855926B2Feb 15, 2005
Instrument and method for combined surface topography and spectroscopic analysis
UNIV BIRMINGHAM8 citations68
US6503688B1Jan 7, 2003
Electron beam resist
UNIV BIRMINGHAM5 citations58
US7670749B2Mar 2, 2010
Resist material and method for forming a patterned resist layer on a substrate
UNIV BIRMINGHAM1 citations49