Inventor
TSUCHIYA HIDEO
JP62 patents
⚠️ This page may combine multiple inventors who share the name “TSUCHIYA HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
21 patentsUS9177372B2Nov 3, 2015
Defect estimation device and method and inspection system and method
NUFLARE TECHNOLOGY INC5 citations84
US8781212B2Jul 15, 2014
Defect estimation device and method and inspection system and method
NUFLARE TECHNOLOGY INC6 citations84
US8355044B2Jan 15, 2013
Reticle defect inspection apparatus and reticle defect inspection method
NUFLARE TECHNOLOGY INC8 citations84
US7973918B2Jul 5, 2011
Apparatus and method for pattern inspection
NUFLARE TECHNOLOGY INC10 citations84
US7872745B2Jan 18, 2011
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC9 citations82
US11004193B2May 11, 2021
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations73
US10026011B2Jul 17, 2018
Mask inspection apparatus, mask evaluation method and mask evaluation system
NUFLARE TECHNOLOGY INC6 citations73
US9804103B2Oct 31, 2017
Inspection method, template substrate, and focus offset method
NUFLARE TECHNOLOGY INC4 citations73
US9797846B2Oct 24, 2017
Inspection method and template
NUFLARE TECHNOLOGY INC2 citations73
US9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US10504219B2Dec 10, 2019
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC1 citations63
US8983113B2Mar 17, 2015
Defect estimation device and method and inspection system and method
NUFLARE TECHNOLOGY INC1 citations63
US8031932B2Oct 4, 2011
Pattern inspection apparatus and method
NUFLARE TECHNOLOGY INC4 citations63
US10984525B2Apr 20, 2021
Pattern inspection method and pattern inspection apparatus
NUFLARE TECHNOLOGY INC0 citations62
US10846846B2Nov 24, 2020
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10775326B2Sep 15, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10712295B2Jul 14, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US9165355B1Oct 20, 2015
Inspection method
NUFLARE TECHNOLOGY INC2 citations60
US10600176B2Mar 24, 2020
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC0 citations52
US10359370B2Jul 23, 2019
Template substrate for use in adjusting focus offset for defect detection
NUFLARE TECHNOLOGY INC0 citations52
US9202270B2Dec 1, 2015
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations52
TOSHIBA KK
15 patentsUS6285783B1Sep 4, 2001
Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer
TOSHIBA KK74 citations96
US5960106ASep 28, 1999
Sample inspection apparatus and sample inspection method
TOSHIBA KK57 citations96
US5744381AApr 28, 1998
Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof
TOSHIBA KK60 citations96
US5475766ADec 12, 1995
Pattern inspection apparatus with corner rounding of reference pattern data
TOSHIBA KK146 citations95
US6883160B2Apr 19, 2005
Pattern inspection apparatus
TOSHIBA KK23 citations93
US5404410AApr 4, 1995
Method and system for generating a bit pattern
TOSHIBA KK38 citations92
US5379348AJan 3, 1995
Pattern defects inspection system
TOSHIBA KK22 citations92
US7421109B2Sep 2, 2008
Pattern inspection apparatus
TOSHIBA KK13 citations84
US7209584B2Apr 24, 2007
Pattern inspection apparatus
TOSHIBA KK11 citations84
US7068364B2Jun 27, 2006
Pattern inspection apparatus
TOSHIBA KK13 citations84
US7551767B2Jun 23, 2009
Pattern inspection apparatus
TOSHIBA KK5 citations74
US7415149B2Aug 19, 2008
Pattern inspection apparatus
TOSHIBA KK3 citations63
US7020321B2Mar 28, 2006
Pattern data converting method and apparatus
TOSHIBA KK2 citations63
US5577171ANov 19, 1996
Figure pattern generating apparatus for detecting pattern defects
TOSHIBA KK2 citations62
US7359043B2Apr 15, 2008
Pattern inspecting method and pattern inspecting apparatus
TOSHIBA KK4 citations60
NIPPON TELEGRAPH & TELEPHONE
4 patentsUS11394571B2Jul 19, 2022
Notification device and notification method
NIPPON TELEGRAPH & TELEPHONE2 citations70
US11343223B2May 24, 2022
Communication apparatus, communication method and program
NIPPON TELEGRAPH & TELEPHONE0 citations61
US11128569B2Sep 21, 2021
Load distribution system and load distribution method
NIPPON TELEGRAPH & TELEPHONE0 citations61
US11805098B2Oct 31, 2023
Communication system and communication method
NIPPON TELEGRAPH & TELEPHONE0 citations51
TSUCHIYA HIDEO
2 patentsOMRON TATEISI ELECTRONICS CO
2 patentsJAPAN VILENE CO LTD
1 patentINOUE TAKAFUMI
1 patentSEIKOSHA KK
1 patentMATSUMOTO EIJI
1 patentABE TAKAYUKI
1 patentADVANCED MASK INSPECTION TECH
1 patentShowing the top 50 of 62 patents by PatentIndex Score.