Inventor
GRINDLING CHRISTIAN
AT2 patents
Patents
2 patentsUS10199255B2Feb 5, 2019
Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck
INFINEON TECHNOLOGIES AG2 citations68
US9862037B2Jan 9, 2018
Method for planarizing one or more workpieces, a workpiece planarization arrangement, a chuck and a replaceable workpiece-support for a chuck
INFINEON TECHNOLOGIES AG0 citations47