Inventor
KULKARNI ASHOK
US26 patents
⚠️ This page may combine multiple inventors who share the name “KULKARNI ASHOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
13 patentsUS7877722B2Jan 25, 2011
Systems and methods for creating inspection recipes
KLA TENCOR CORP80 citations98
US7756658B2Jul 13, 2010
Systems and methods for detecting defects on a wafer and generating inspection results for the wafer
KLA TENCOR CORP62 citations97
US6097887AAug 1, 2000
Software system and method for graphically building customized recipe flowcharts
KLA TENCOR CORP155 citations96
US6233719B1May 15, 2001
System and method for analyzing semiconductor production data
KLA TENCOR CORP84 citations95
US10043261B2Aug 7, 2018
Generating simulated output for a specimen
KLA TENCOR CORP32 citations94
US10181185B2Jan 15, 2019
Image based specimen process control
KLA TENCOR CORP21 citations93
US6775819B1Aug 10, 2004
Software system and method for graphically building customized recipe flowcharts
KLA TENCOR CORP56 citations93
US9355208B2May 31, 2016
Detecting defects on a wafer
KLA TENCOR CORP8 citations79
US10127651B2Nov 13, 2018
Defect sensitivity of semiconductor wafer inspectors using design data with wafer image data
KLA TENCOR CORP2 citations73
US10359371B2Jul 23, 2019
Determining one or more characteristics of a pattern of interest on a specimen
KLA TENCOR CORP4 citations72
US9965848B2May 8, 2018
Shape based grouping
KLA TENCOR CORP4 citations69
US10503078B2Dec 10, 2019
Criticality analysis augmented process window qualification sampling
KLA TENCOR CORP1 citations60
US10074167B2Sep 11, 2018
Reducing registration and design vicinity induced noise for intra-die inspection
KLA TENCOR CORP0 citations38
KLA TENCOR TECH CORP
5 patentsUS7676077B2Mar 9, 2010
Methods and systems for utilizing design data in combination with inspection data
KLA TENCOR TECH CORP277 citations98
US8041103B2Oct 18, 2011
Methods and systems for determining a position of inspection data in design data space
KLA TENCOR TECH CORP85 citations97
US7729529B2Jun 1, 2010
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
KLA TENCOR TECH CORP39 citations90
US7142992B1Nov 28, 2006
Flexible hybrid defect classification for semiconductor manufacturing
KLA TENCOR TECH CORP28 citations89
US7711177B2May 4, 2010
Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
KLA TENCOR TECH CORP11 citations82