Inventor

BHATTACHARYYA SANTOSH

US19 patents

⚠️ This page may combine multiple inventors who share the name “BHATTACHARYYA SANTOSH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BHATTACHARYYA SANTOSH

KLA TENCOR CORP

Systems and methods for detecting defects on a wafer and generating inspection results for the wafer

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer

And noise based care areas

High sensitivity repeater defect detection

Alignment of inspection to design using built in targets

Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures

Combined patch and design-based defect detection

Defect sensitivity of semiconductor wafer inspectors using design data with wafer image data

System, method and computer program product for automatically generating a wafer image to design coordinate mapping

Inspection for specimens with extensive die to die process variation

Sub-pixel alignment of inspection to design

Shape based grouping

Defect-location determination using correction loop for pixel alignment

System and method for difference filter and aperture selection using shallow deep learning

BHASKAR KRIS

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer

KLA TENCOR TECH CORP

Methods, defect review tools, and systems for locating a defect in a defect review process

CHANG ELLIS

Determining design coordinates for wafer defects

KLA CORP

BBP assisted defect detection flow for SEM images