Inventor

SHEN XIAOHUA

US5 patents

⚠️ This page may combine multiple inventors who share the name “SHEN XIAOHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AUTOGENOMICS INC

1 patent

US7354389B2Apr 8, 2008

Microarray detector and methods

AUTOGENOMICS INC67 citations95

SHEN XIAOHUA

1 patent

US8546805B2Oct 1, 2013

Two-beam laser annealing with improved temperature performance

SHEN XIAOHUA14 citations79

WANG YUN

1 patent

US9490128B2Nov 8, 2016

Non-melt thin-wafer laser thermal annealing methods

WANG YUN6 citations72

VEECO INSTR INC

1 patent

US12512346B2Dec 30, 2025

Scatter melt detection to determine phase transition of semiconductor during laser annealing

VEECO INSTR INC0 citations53

Ultratech

1 patent

US8906742B2Dec 9, 2014

Two-beam laser annealing with improved temperature performance

Ultratech1 citations49