Inventor
YU TA-CHING
TW13 patents
Patents
13 patentsUS9418868B1Aug 16, 2016
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations92
US10049918B2Aug 14, 2018
Directional patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9659821B1May 23, 2017
Method of forming interconnect structures by self-aligned approach
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10163654B2Dec 25, 2018
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9412649B1Aug 9, 2016
Method of fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations63
US12394633B2Aug 19, 2025
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11894238B2Feb 6, 2024
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11387113B2Jul 12, 2022
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11624985B2Apr 11, 2023
Methods of defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10795270B2Oct 6, 2020
Methods of defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10818509B2Oct 27, 2020
Method of fabricating semiconductor device with reduced trench distortions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10276377B2Apr 30, 2019
Method for patterning interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9824922B1Nov 21, 2017
Method of forming interconnect structures by self-aligned approach
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51