Inventor
KUO MING-JHIH
TW12 patents
Patents
12 patentsUS9799567B2Oct 24, 2017
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10163720B2Dec 25, 2018
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9711420B1Jul 18, 2017
Inline focus monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10451979B2Oct 22, 2019
Apparatus for EUV lithography and method of measuring focus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations66
US11621191B2Apr 4, 2023
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11935747B2Mar 19, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11022898B2Jun 1, 2021
Apparatus for EUV lithography and method of measuring focus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10522413B2Dec 31, 2019
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10276377B2Apr 30, 2019
Method for patterning interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10879119B2Dec 29, 2020
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12165923B2Dec 10, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44
US11862690B2Jan 2, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44