Inventor
AKEBOSHI YUYA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “AKEBOSHI YUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
6 patentsUS10008400B2Jun 26, 2018
Substrate processing device and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP2 citations71
US10529588B2Jan 7, 2020
Substrate treatment method and substrate treatment apparatus
TOSHIBA MEMORY CORP0 citations51
US10014186B2Jul 3, 2018
Substrate treatment method and substrate treatment apparatus
TOSHIBA MEMORY CORP0 citations51
US9991159B2Jun 5, 2018
Semiconductor device manufacture method
TOSHIBA MEMORY CORP1 citations51
US10403524B2Sep 3, 2019
Substrate processing device and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations50
US10879087B2Dec 29, 2020
Substrate treatment apparatus and manufacturing method of semiconductor device
TOSHIBA MEMORY CORP0 citations49
KIOXIA CORP
3 patentsUS11784064B2Oct 10, 2023
Substrate treatment apparatus and manufacturing method of semiconductor device
KIOXIA CORP0 citations60
US12512335B2Dec 30, 2025
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
KIOXIA CORP0 citations56
US11296111B2Apr 5, 2022
Semiconductor memory device and manufacturing method of semiconductor memory device
KIOXIA CORP0 citations49