Inventor

FULLER MATTHEW A

US42 patents

⚠️ This page may combine multiple inventors who share the name “FULLER MATTHEW A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FULLER MATTHEW A

ENTEGRIS INC

Wafer container with door actuated wafer restraint

Front opening substrate container with bottom plate

Wafer container and door with vibration dampening latching mechanism

Wafer container with secondary wafer restraint system

Substrate carrier

Front opening substrate container with bottom plate

Wafer container and door with vibration dampening latching mechanism

Wafer container with door actuated wafer restraint

Photochromic substrate container

Wafer container with door interface seal

CMP retaining ring

Kinematic coupling with textured contact surfaces

Wafer container and door with cam latching mechanism

Substrate container

Wafer carrier with apertured door for cleaning

Purge connectors and modules for a substrate container

Wafer container with latching mechanism for large diameter wafers

Wafer container with tubular environmental control components

Membrane diffuser for a substrate container

Wafer cushion

Membrane diffuser for a substrate container

Wafer container with external passive getter module

Substrate container with door gasket

Wafer container with latching mechanism for large diameter wafers

Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container

Wafer container purge port assembly

Substrate container with door gasket

Semiconductor substrate carrying container with support wall formed with corrugation portions

Remote optimization of purge flow rates in a container

Semiconductor substrate carrying container with front and rear openings

Substrate container valve assemblies

Wafer carrier

Wafer carrier door

Handle for wafer carrier

Filter module

Substrate cushion brace retainer

Replaceable wafer support backstop

BURNS JOHN

Porous barrier for evenly distributed purge gas in a microenvironment

WATSON JAMES A

Wafer container with tubular environmental control components

BLADE SOFTWARE INC

Event management system

ADAMS MICHAEL S

Wafer carrier

GREGERSON BARRY

Wafer container with door guide and seal