Inventor
JUNG WOO SIN
KR8 patents
Patents
8 patentsUS12366239B2Jul 22, 2025
Pump, apparatus for supplying chemical liquid and apparatus for processing substrate
SEMES CO LTD0 citations60
US12429042B2Sep 30, 2025
Torsion pump and chemical liquid supply unit
SEMES CO LTD0 citations59
US12331736B2Jun 17, 2025
Pump, chemical liquid supplying unit, and substrate treating apparatus
SEMES CO LTD0 citations59
US12528098B2Jan 20, 2026
Apparatus for pressurizing photoresist and system for supplying photoresist
SEMES CO LTD0 citations57
US12585190B2Mar 24, 2026
Liquid chemical supply apparatus and liquid chemical supply system
SEMES CO LTD0 citations54
US11845090B2Dec 19, 2023
Nozzle apparatus, apparatus and method for treating substrate
SEMES CO LTD0 citations53
US12593645B2Mar 31, 2026
Liquid trap tank and liquid supply unit for the liquid trap tank
SEMES CO LTD0 citations47
US11752530B2Sep 12, 2023
Fluid discharging device, substrate processing system including same, and fluid discharging method thereof
SEMES CO LTD0 citations47