P

Inventor

LEE GENE

US33 patents
⚠️ This page may combine multiple inventors who share the name “LEE GENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

16 patents
US6235643B1May 22, 2001

Method for etching a trench having rounded top and bottom corners in a silicon substrate

APPLIED MATERIALS INC305 citations98
US6583063B1Jun 24, 2003

Plasma etching of silicon using fluorinated gas mixtures

APPLIED MATERIALS INC59 citations96
US9595451B1Mar 14, 2017

Highly selective etching methods for etching dielectric materials

APPLIED MATERIALS INC16 citations84
US9299580B2Mar 29, 2016

High aspect ratio plasma etch for 3D NAND semiconductor applications

APPLIED MATERIALS INC17 citations83
US10636675B2Apr 28, 2020

Methods of etching metal-containing layers

APPLIED MATERIALS INC4 citations82
US10497578B2Dec 3, 2019

Methods for high temperature etching a material layer using protection coating

APPLIED MATERIALS INC2 citations72
US11527408B2Dec 13, 2022

Multiple spacer patterning schemes

APPLIED MATERIALS INC4 citations71
US10957558B2Mar 23, 2021

Methods of etching metal-containing layers

APPLIED MATERIALS INC3 citations71
US9852923B2Dec 26, 2017

Mask etch for patterning

APPLIED MATERIALS INC2 citations70
US12266537B2Apr 1, 2025

Selective barrier metal etching

APPLIED MATERIALS INC0 citations62
US12211693B2Jan 28, 2025

Spacer patterning process with flat top profile

APPLIED MATERIALS INC0 citations62
US11315787B2Apr 26, 2022

Multiple spacer patterning schemes

APPLIED MATERIALS INC0 citations60
US11127599B2Sep 21, 2021

Methods for etching a hardmask layer

APPLIED MATERIALS INC0 citations60
US12322602B2Jun 3, 2025

Recessed metal etching methods

APPLIED MATERIALS INC0 citations54
US10867795B2Dec 15, 2020

Method of etching hardmasks containing high hardness materials

APPLIED MATERIALS INC0 citations50
US11658043B2May 23, 2023

Selective anisotropic metal etch

APPLIED MATERIALS INC0 citations46

DISNEY ENTPR INC

3 patents

AVELLINO CO LTD

2 patents

AVELLINO LAB USA INC

2 patents

AIONCO INC

2 patents

OSIRIS THERAPEUTICS INC

1 patent

COMMISSARIAT ENERGIE ATOMIQUE

1 patent

CAESARS ENTPR SERVICES LLC

1 patent

SEOUL NAT UNIV IND FOUNDATION

1 patent

KAYTIS CLAY

1 patent

SNU R&DB FOUNDATION

1 patent

LEE GENE

1 patent

LEE SANG YUP

1 patent