Inventor
GUO JINRUI
US16 patents
Patents
16 patentsUS11170994B1Nov 9, 2021
CD dependent gap fill and conformal films
APPLIED MATERIALS INC3 citations72
US12454751B2Oct 28, 2025
Atomic layer deposition on optical structures
APPLIED MATERIALS INC0 citations62
US12109641B2Oct 8, 2024
Optical device having structural and refractive index gradation, and method of fabricating the same
APPLIED MATERIALS INC0 citations62
US11977246B2May 7, 2024
Mask orientation
APPLIED MATERIALS INC0 citations62
US11804372B2Oct 31, 2023
CD dependent gap fill and conformal films
APPLIED MATERIALS INC0 citations62
US11629402B2Apr 18, 2023
Atomic layer deposition on optical structures
APPLIED MATERIALS INC0 citations62
US11630251B2Apr 18, 2023
Mask orientation
APPLIED MATERIALS INC0 citations62
US11367614B2Jun 21, 2022
Surface roughness for flowable CVD film
APPLIED MATERIALS INC0 citations62
US11226440B2Jan 18, 2022
Mask orientation
APPLIED MATERIALS INC0 citations62
US11152248B2Oct 19, 2021
Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
APPLIED MATERIALS INC1 citations62
US10707116B2Jul 7, 2020
Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
APPLIED MATERIALS INC1 citations62
US12584211B2Mar 24, 2026
Method of thin film deposition in trenches
APPLIED MATERIALS INC0 citations61
US11572619B2Feb 7, 2023
Method of thin film deposition in trenches
APPLIED MATERIALS INC0 citations61
US11170990B2Nov 9, 2021
Polysilicon liners
APPLIED MATERIALS INC0 citations61
US12493138B2Dec 9, 2025
Airgap structures for improved eyepiece efficiency
APPLIED MATERIALS INC0 citations51
US10041167B2Aug 7, 2018
Cyclic sequential processes for forming high quality thin films
APPLIED MATERIALS INC1 citations51