Inventor
KELLOGG MICHAEL C
US35 patents
⚠️ This page may combine multiple inventors who share the name “KELLOGG MICHAEL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
19 patentsUS9852889B1Dec 26, 2017
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP135 citations99
US10115568B2Oct 30, 2018
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP57 citations98
US10283330B2May 7, 2019
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
LAM RES CORP14 citations86
US11195706B2Dec 7, 2021
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
LAM RES CORP7 citations84
US10615003B2Apr 7, 2020
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP9 citations84
US9123661B2Sep 1, 2015
Silicon containing confinement ring for plasma processing apparatus and method of forming thereof
LAM RES CORP15 citations84
US8796153B2Aug 5, 2014
Clamped monolithic showerhead electrode
LAM RES CORP7 citations84
US10118263B2Nov 6, 2018
Monolithic manifold mask and substrate concepts
LAM RES CORP11 citations82
US10825656B2Nov 3, 2020
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP2 citations73
US10665435B2May 26, 2020
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10395902B2Aug 27, 2019
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10049862B2Aug 14, 2018
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP4 citations72
US10557197B2Feb 11, 2020
Monolithic gas distribution manifold and various construction techniques and use cases therefor
LAM RES CORP4 citations71
US10037869B2Jul 31, 2018
Plasma processing devices having multi-port valve assemblies
LAM RES CORP2 citations71
US8975817B2Mar 10, 2015
Pressure controlled heat pipe temperature control plate
LAM RES CORP2 citations62
US11764086B2Sep 19, 2023
Wafer transport assembly with integrated buffers
LAM RES CORP0 citations61
US12100575B2Sep 24, 2024
Plasma processing devices having multi-port valve assemblies
LAM RES CORP0 citations60
US10914003B2Feb 9, 2021
Monolithic gas distribution manifold and various construction techniques and use cases therefor
LAM RES CORP0 citations59
US12562356B2Feb 24, 2026
Linear arrangement for substrate processing tools
LAM RES CORP0 citations39
DE LA LLERA ANTHONY
4 patentsUS8573152B2Nov 5, 2013
Showerhead electrode
DE LA LLERA ANTHONY595 citations98
US8470127B2Jun 25, 2013
Cam-locked showerhead electrode and assembly
DE LA LLERA ANTHONY11 citations80
US8847495B2Sep 30, 2014
Movable grounding arrangements in a plasma processing chamber and methods therefor
DE LA LLERA ANTHONY2 citations62
US9111731B2Aug 18, 2015
Gas feed insert in a plasma processing chamber and methods therefor
DE LA LLERA ANTHONY0 citations52
KELLOGG MICHAEL C
4 patentsUS8485128B2Jul 16, 2013
Movable ground ring for a plasma processing chamber
KELLOGG MICHAEL C38 citations93
US8826855B2Sep 9, 2014
C-shaped confinement ring for a plasma processing chamber
KELLOGG MICHAEL C16 citations83
US8628268B2Jan 14, 2014
Cam lock electrode clamp
KELLOGG MICHAEL C2 citations61
US9171702B2Oct 27, 2015
Consumable isolation ring for movable substrate support assembly of a plasma processing chamber
KELLOGG MICHAEL C1 citations51