Inventor
LUCCHESI KENNETH
US12 patents
Patents
12 patentsUS9852889B1Dec 26, 2017
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP135 citations99
US10115568B2Oct 30, 2018
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP57 citations98
US9761414B2Sep 12, 2017
Uniformity control circuit for use within an impedance matching circuit
LAM RES CORP38 citations94
US10283330B2May 7, 2019
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
LAM RES CORP14 citations86
US11195706B2Dec 7, 2021
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
LAM RES CORP7 citations84
US10615003B2Apr 7, 2020
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP9 citations84
US10002746B1Jun 19, 2018
Multi regime plasma wafer processing to increase directionality of ions
LAM RES CORP8 citations84
US10916409B2Feb 9, 2021
Active control of radial etch uniformity
LAM RES CORP2 citations73
US10825656B2Nov 3, 2020
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
LAM RES CORP2 citations73
US10304662B2May 28, 2019
Multi regime plasma wafer processing to increase directionality of ions
LAM RES CORP5 citations73
US10115564B2Oct 30, 2018
Uniformity control circuit for use within an impedance matching circuit
LAM RES CORP3 citations73
US11935730B2Mar 19, 2024
Systems and methods for cleaning an edge ring pocket
LAM RES CORP0 citations62