Inventor
JANG SHEN-JR
TW2 patents
Patents
2 patentsUS7151980B2Dec 19, 2006
Transport management system and method thereof
TAIWAN SEMICONDUCTOR MFG26 citations86
US7302305B2Nov 27, 2007
Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job
TAIWAN SEMICONDUCTOR MFG5 citations56