Inventor
DENTONI LITTA EUGENIO
BE10 patents
Patents
10 patentsUS11164942B1Nov 2, 2021
Method for forming nanosheet transistor structures
IMEC VZW21 citations92
US11367662B2Jun 21, 2022
Semiconductor devices and methods of forming the same
IMEC VZW3 citations72
US11515399B2Nov 29, 2022
Self-aligned contacts for walled nanosheet and forksheet field effect transistor devices
IMEC VZW3 citations71
US11488954B2Nov 1, 2022
Method of cointegrating semiconductor structures for different voltage transistors
IMEC VZW2 citations71
US11545401B2Jan 3, 2023
Isolated semiconductor layer stacks for a semiconductor device
IMEC VZW0 citations62
US11335597B2May 17, 2022
Method for forming a buried metal line
IMEC VZW1 citations62
US12520556B2Jan 6, 2026
Method for forming a semiconductor device
IMEC VZW0 citations50
US12237371B2Feb 25, 2025
Method for forming a semiconductor device
IMEC VZW0 citations50
US11462443B2Oct 4, 2022
Self-aligned contacts for nanosheet field effect transistor devices
IMEC VZW0 citations50
US11348842B2May 31, 2022
Split replacement metal gate integration
IMEC VZW0 citations49