Inventor
KASAI TAKAHITO
JP7 patents
Patents
7 patentsUS10607869B2Mar 31, 2020
Substrate processing system and control device
TOKYO ELECTRON LTD2 citations70
US9207665B2Dec 8, 2015
Heat treatment apparatus and method of controlling the same
TOKYO ELECTRON LTD2 citations61
US12165892B2Dec 10, 2024
Control device, system and control method
TOKYO ELECTRON LTD0 citations48
US11568027B2Jan 31, 2023
License authentication device and license authentication method
TOKYO ELECTRON LTD0 citations46
US10504803B2Dec 10, 2019
Substrate processing system, control device, and film deposition method and program
TOKYO ELECTRON LTD0 citations39
US10395934B2Aug 27, 2019
Control device, substrate processing system, substrate processing method, and program
TOKYO ELECTRON LTD0 citations39
US10692782B2Jun 23, 2020
Control device, substrate processing system, substrate processing method, and program
TOKYO ELECTRON LTD0 citations37