Inventor
LI LIFU
JP7 patents
Patents
7 patentsUS12387914B2Aug 12, 2025
Upper electrode assembly
TOKYO ELECTRON LTD0 citations57
US12148598B2Nov 19, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations54
US11676800B2Jun 13, 2023
Substrate processing apparatus and control method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations54
US11264248B2Mar 1, 2022
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations53
US12482638B2Nov 25, 2025
Substrate processing apparatus and shutter
TOKYO ELECTRON LTD0 citations46
US12308221B2May 20, 2025
Substrate processing system and method for installing edge ring
TOKYO ELECTRON LTD0 citations43
US12217942B2Feb 4, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations43