Inventor · disambiguated record

Haruyuki Goto

Also filed as: GOTO HARUYUKI

2 granted patents·88 citations·filing 1981–1991

66Inventor score

Technology areasH10P

Files withTOKYO SHIBAURA ELECTRIC CO1 TOSHIBA KK1

Top patents by PatentIndex Score

2 records

0178US5185295AMethod for dicing semiconductor substrates using a laser scribing and dual etch processTOSHIBA KK·Filed 1991·Granted Feb 9, 1993·75 cites·7 claims
0241US4383886AMethod of manufacturing a semiconductor elementTOKYO SHIBAURA ELECTRIC CO·Filed 1981·Granted May 17, 1983·13 cites·9 claims

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