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Inventor
MATTHEUS ALEXANDER
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “MATTHEUS ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
1 patent
US6566271B1
May 20, 2003
Method of producing a semiconductor surface covered with fluorine
INFINEON TECHNOLOGIES AG
2 citations
54
R3T GMBH RAPID REACTIVE RADICA
1 patent
US7665416B2
Feb 23, 2010
Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
R3T GMBH RAPID REACTIVE RADICA
0 citations
38