Inventor
CHANG LO-HENG
TW51 patents
Patents
50 patentsUS11315925B2Apr 26, 2022
Uniform gate width for nanostructure devices
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US12342616B2Jun 24, 2025
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US11855096B2Dec 26, 2023
Uniform gate width for nanostructure devices
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75
US11621197B2Apr 4, 2023
Semiconductor device with gate cut feature and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations75
US12074204B2Aug 27, 2024
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11967594B2Apr 23, 2024
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11916122B2Feb 27, 2024
Gate all around transistor with dual inner spacers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11658226B2May 23, 2023
Backside gate contact
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11450754B2Sep 20, 2022
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11450663B2Sep 20, 2022
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11417777B2Aug 16, 2022
Enlargement of GAA nanostructure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11398550B2Jul 26, 2022
Semiconductor device with facet S/D feature and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11322409B2May 3, 2022
Multi-gate devices and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11309424B2Apr 19, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11264502B2Mar 1, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11205711B2Dec 21, 2021
Selective inner spacer implementations
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11121037B2Sep 14, 2021
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12538570B2Jan 27, 2026
Reduction of gate-drain capacitance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12532505B2Jan 20, 2026
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12507445B2Dec 23, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12446305B2Oct 14, 2025
Uniform gate width for nanostructure devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12389618B2Aug 12, 2025
Semiconductor transistor device includes backside via electrically connecting epitaxial source/drain structures and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12382666B2Aug 5, 2025
Enlargement of GAA nanostructure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12347775B2Jul 1, 2025
Semiconductor devices with backside power rail and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12349379B2Jul 1, 2025
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12302607B2May 13, 2025
Backside gate contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12278273B2Apr 15, 2025
Semiconductor device with backside gate isolation structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12107011B2Oct 1, 2024
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12046516B2Jul 23, 2024
Semiconductor device with gate cut feature and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11996461B2May 28, 2024
Backside gate contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11901428B2Feb 13, 2024
Semiconductor device with backside gate isolation structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11769696B2Sep 26, 2023
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11532626B2Dec 20, 2022
Reduction of gate-drain capacitance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11502034B2Nov 15, 2022
Semiconductor devices with backside power rail and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11437279B1Sep 6, 2022
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12513937B2Dec 30, 2025
Semiconductor devices and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12471315B2Nov 11, 2025
Semiconductor device including spacers on sides of dielectric structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12457798B2Oct 28, 2025
Dielectric liner for field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12300732B2May 13, 2025
Gate all around transistor with dual inner spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12243780B2Mar 4, 2025
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11996482B2May 28, 2024
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11984361B2May 14, 2024
Multi-gate devices and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11929287B2Mar 12, 2024
Dielectric liner for field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11605737B2Mar 14, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11600529B2Mar 7, 2023
Multi-gate devices and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11469326B2Oct 11, 2022
Semiconductor devices and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11430892B2Aug 30, 2022
Inner spacers for gate-all-around transistors
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12588242B2Mar 24, 2026
Field effect transistor with dual silicide and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11855216B2Dec 26, 2023
Inner spacers for gate-all-around transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12501671B2Dec 16, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
Showing the top 50 of 51 patents by PatentIndex Score.