Inventor
ROKITSKI ROSTISLAV
US13 patents
⚠️ This page may combine multiple inventors who share the name “ROKITSKI ROSTISLAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
8 patentsUS9207119B2Dec 8, 2015
Active spectral control during spectrum synthesis
Cymer LLC11 citations83
US9715180B2Jul 25, 2017
Wafer-based light source parameter control
Cymer LLC9 citations80
USRE45957EMar 29, 2016
Regenerative ring resonator
Cymer LLC4 citations73
US10095118B2Oct 9, 2018
Lithography optics adjustment and monitoring
Cymer LLC4 citations64
US12316063B2May 27, 2025
Output light beam formation apparatus
Cymer LLC0 citations51
US10267687B2Apr 23, 2019
Adjusting an amount of coherence of a light beam
Cymer LLC0 citations49
US9945730B2Apr 17, 2018
Adjusting an amount of coherence of a light beam
Cymer LLC1 citations49
US10036960B2Jul 31, 2018
Wafer-based light source parameter control
Cymer LLC0 citations48