P

Inventor

SON YOUNG JUN

KR26 patents
⚠️ This page may combine multiple inventors who share the name “SON YOUNG JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMES CO LTD

14 patents
US12595965B2Apr 7, 2026

Chilling unit, heat treatment apparatus including same, and heat treatment method

SEMES CO LTD0 citations62
US12476119B2Nov 18, 2025

Substrate processing apparatus and substrate processing method

SEMES CO LTD0 citations62
US11960236B2Apr 16, 2024

Home port and substrate processing apparatus using same

SEMES CO LTD0 citations62
US12557589B2Feb 17, 2026

Wafer treatment apparatus capable of measuring warpage of wafer and method of measuring warpage of wafer

SEMES CO LTD0 citations61
US12532695B2Jan 20, 2026

Apparatus for treating a substrate and electrostatic monitoring method of treatment liquid

SEMES CO LTD0 citations61
US12366239B2Jul 22, 2025

Pump, apparatus for supplying chemical liquid and apparatus for processing substrate

SEMES CO LTD0 citations60
US12429042B2Sep 30, 2025

Torsion pump and chemical liquid supply unit

SEMES CO LTD0 citations59
US12331736B2Jun 17, 2025

Pump, chemical liquid supplying unit, and substrate treating apparatus

SEMES CO LTD0 citations59
US12585190B2Mar 24, 2026

Liquid chemical supply apparatus and liquid chemical supply system

SEMES CO LTD0 citations54
US12588453B2Mar 24, 2026

Apparatus for treating substrate and related manufacturing method

SEMES CO LTD0 citations51
US12460627B2Nov 4, 2025

Torsion pump and apparatus for supplying chemical liquid

SEMES CO LTD0 citations51
US12142493B2Nov 12, 2024

Substrate processing apparatus and substrate processing method

SEMES CO LTD0 citations51
US12341028B2Jun 24, 2025

Apparatus for processing substrate

SEMES CO LTD0 citations50
US12500096B2Dec 16, 2025

Apparatus for inspecting droplet and substrate processing apparatus including the same

SEMES CO LTD0 citations48

UNIV ARIZONA

4 patents

HYUNDAI MOTOR CO LTD

2 patents

MANDO CORP

2 patents

CHOI JAE YOUNG

1 patent

LS ELECTRIC CO LTD

1 patent

KOREA ENERGY RESEARCH INST

1 patent

LEE SUNG JE

1 patent