Inventor
GERLACH ROBERT L
21 patents
⚠️ This page may combine multiple inventors who share the name “GERLACH ROBERT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
11 patentsUS6900447B2May 31, 2005
Focused ion beam system with coaxial scanning electron microscope
FEI CO77 citations97
US6414307B1Jul 2, 2002
Method and apparatus for enhancing yield of secondary ions
FEI CO123 citations94
US6949756B2Sep 27, 2005
Shaped and low density focused ion beams
FEI CO20 citations92
US6946654B2Sep 20, 2005
Collection of secondary electrons through the objective lens of a scanning electron microscope
FEI CO30 citations92
US6683320B2Jan 27, 2004
Through-the-lens neutralization for charged particle beam system
FEI CO32 citations92
US7009187B2Mar 7, 2006
Particle detector suitable for detecting ions and electrons
FEI CO28 citations91
US6797953B2Sep 28, 2004
Electron beam system using multiple electron beams
FEI CO38 citations91
US5241182AAug 31, 1993
Precision electrostatic lens system and method of manufacture
FEI CO38 citations87
US6977386B2Dec 20, 2005
Angular aperture shaped beam system and method
FEI CO18 citations84
US6710338B2Mar 23, 2004
Focused ion beam system
FEI CO25 citations84
US6797969B2Sep 28, 2004
Multi-column FIB for nanofabrication applications
FEI CO12 citations73
PERKIN ELMER CORP
8 patentsUS4810880AMar 7, 1989
Direct imaging monochromatic electron microscope
PERKIN ELMER CORP31 citations92
US4659899AApr 21, 1987
Vacuum-compatible air-cooled plasma device
PERKIN ELMER CORP44 citations92
US4412771ANov 1, 1983
Sample transport system
PERKIN ELMER CORP35 citations91
US5032724AJul 16, 1991
Multichannel charged-particle analyzer
PERKIN ELMER CORP23 citations89
US4345152AAug 17, 1982
Magnetic lens
PERKIN ELMER CORP28 citations82
US4296323AOct 20, 1981
Secondary emission mass spectrometer mechanism to be used with other instrumentation
PERKIN ELMER CORP16 citations74
US4882487ANov 21, 1989
Direct imaging monochromatic electron microscope
PERKIN ELMER CORP5 citations63
US4806754AFeb 21, 1989
High luminosity spherical analyzer for charged particles
PERKIN ELMER CORP2 citations63