Inventor
HIRAGA RYOZO
17 patents
Patents
17 patentsUS4789294ADec 6, 1988
Wafer handling apparatus and method
CANON KK593 citations98
US4262208AApr 14, 1981
Photo-electrical detecting apparatus
CANON KK30 citations92
US3931789AJan 13, 1976
Vapor deposition apparatus
CANON KK44 citations86
US4440493AApr 3, 1984
Printing apparatus
CANON KK23 citations82
US4315201AFeb 9, 1982
Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements
CANON KK24 citations82
US4301363ANov 17, 1981
Alignment device
CANON KK23 citations82
US4202627AMay 13, 1980
Photoelectric detecting apparatus
CANON KK19 citations81
US3944921AMar 16, 1976
Logic level test probe with grated oscillator
CANON KK21 citations81
US4806773AFeb 21, 1989
Wafer position detecting method and apparatus
CANON KK14 citations74
US4515481AMay 7, 1985
Apparatus for processing a signal for aligning
CANON KK16 citations73
US4278893AJul 14, 1981
Alignment apparatus
CANON KK8 citations73
US4275306AJun 23, 1981
Alignment apparatus
CANON KK15 citations73
US4553845ANov 19, 1985
Device for and method of aligning two bodies
CANON KK13 citations72
US4545684AOct 8, 1985
Alignment mark detecting apparatus and method
CANON KK17 citations72
US4504148AMar 12, 1985
System for detecting a signal for aligning two bodies and signal _processing method
CANON KK16 citations72
US4530604AJul 23, 1985
Method of aligning a mask and a wafer for manufacturing semiconductor circuit elements
CANON KK7 citations70
US4487505ADec 11, 1984
Apparatus for processing a signal for alignment
CANON KK4 citations60