Inventor
ELLWANGER RUSSELL C
US11 patents
⚠️ This page may combine multiple inventors who share the name “ELLWANGER RUSSELL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6159299ADec 12, 2000
Wafer pedestal with a purge ring
APPLIED MATERIALS INC134 citations97
US6206971B1Mar 27, 2001
Integrated temperature controlled exhaust and cold trap assembly
APPLIED MATERIALS INC90 citations96
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US6517592B2Feb 11, 2003
Cold trap assembly
APPLIED MATERIALS INC21 citations91
US6548402B2Apr 15, 2003
Method of depositing a thick titanium nitride film
APPLIED MATERIALS INC16 citations82
US6365495B2Apr 2, 2002
Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature
APPLIED MATERIALS INC13 citations73