Inventor
MARUYAMA FUMIAKI
JP3 patents
⚠️ This page may combine multiple inventors who share the name “MARUYAMA FUMIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MARUYAMA FUMIAKI
2 patentsUS8273146B1Sep 25, 2012
Wafer and epitaxial wafer, and manufacturing processes therefor
MARUYAMA FUMIAKI2 citations55
US9163327B2Oct 20, 2015
Silicon wafer and a silicon epitaxial wafer having a polycrystal silicon layer formed on a major surface including boron concentration of the polycrystal silicon layer being 1×1015 atom/cm3 or less
MARUYAMA FUMIAKI0 citations45