Inventor
MUKAI KIICHIRO
JP21 patents
⚠️ This page may combine multiple inventors who share the name “MUKAI KIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
20 patentsUS4897709AJan 30, 1990
Titanium nitride film in contact hole with large aspect ratio
HITACHI LTD151 citations99
US4857137AAug 15, 1989
Process for surface treatment
HITACHI LTD520 citations99
US4891684AJan 2, 1990
Semiconductor device
HITACHI LTD84 citations96
US4599135AJul 8, 1986
Thin film deposition
HITACHI LTD82 citations96
US5292673AMar 8, 1994
Method of manufacturing a semiconductor device
HITACHI LTD99 citations95
US4365264ADec 21, 1982
Semiconductor device with high density low temperature deposited Siw Nx Hy Oz passivating layer
HITACHI LTD91 citations95
US5643473AJul 1, 1997
Dry etching method
HITACHI LTD21 citations92
US5391915AFeb 21, 1995
Integrated circuit having reduced soft errors and reduced penetration of alkali impurities into the substrate
HITACHI LTD22 citations92
US5147500ASep 15, 1992
Dry etching method
HITACHI LTD32 citations92
US5079191AJan 7, 1992
Process for producing a semiconductor device
HITACHI LTD39 citations92
US4943344AJul 24, 1990
Etching method
HITACHI LTD41 citations92
US4937650AJun 26, 1990
Semiconductor capacitor device with dual dielectric
HITACHI LTD39 citations92
US4842891AJun 27, 1989
Method of forming a copper film by chemical vapor deposition
HITACHI LTD27 citations92
US4636833AJan 13, 1987
Semiconductor device
HITACHI LTD34 citations92
US4956043ASep 11, 1990
Dry etching apparatus
HITACHI LTD46 citations89
US5013526AMay 7, 1991
Superconducting alloys comprising tungsten, molybdenum, silicon and oxygen
HITACHI LTD13 citations74
US4570175AFeb 11, 1986
Three-dimensional semiconductor device with thin film monocrystalline member contacting substrate at a plurality of locations
HITACHI LTD11 citations74
US6747339B1Jun 8, 2004
Integrated circuit having reduced soft errors and reduced penetration of alkali impurities into the substrate
HITACHI LTD11 citations73
US4926238AMay 15, 1990
Semiconductor device and method for producing the same
HITACHI LTD17 citations73
US4809052AFeb 28, 1989
Semiconductor memory device
HITACHI LTD7 citations73