P

Inventor

SHIGEMITSU FUMIAKI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIGEMITSU FUMIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

3 patents
US6991878B2Jan 31, 2006

Photomask repair method and apparatus

TOSHIBA KK23 citations92
US4840874AJun 20, 1989

Method of forming resist pattern

TOSHIBA KK30 citations90
US4976810ADec 11, 1990

Method of forming pattern and apparatus for implementing the same

TOSHIBA KK20 citations81

TOKYO SHIBAURA ELECTRIC CO

3 patents
US4717645AJan 5, 1988

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO26 citations91
US5051338ASep 24, 1991

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO16 citations80
US4897337AJan 30, 1990

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO7 citations72