Inventor
USUDA KINYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “USUDA KINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS4840874AJun 20, 1989
Method of forming resist pattern
TOSHIBA KK30 citations90
US4745422AMay 17, 1988
Automatic developing apparatus
TOSHIBA KK30 citations90
US4976810ADec 11, 1990
Method of forming pattern and apparatus for implementing the same
TOSHIBA KK20 citations81
US4755442AJul 5, 1988
Pattern developing process and apparatus therefor
TOSHIBA KK17 citations73
TOKYO SHIBAURA ELECTRIC CO
3 patentsUS4717645AJan 5, 1988
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO26 citations91
US5051338ASep 24, 1991
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO16 citations80
US4897337AJan 30, 1990
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO7 citations72