Inventor
KANO HARUYUKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KANO HARUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO METAL IND
3 patentsUS5589116ADec 31, 1996
Process for preparing a silicon carbide sintered body for use in semiconductor equipment
SUMITOMO METAL IND55 citations90
US5514475AMay 7, 1996
Heat-resistant electrical insulating layer
SUMITOMO METAL IND8 citations69
US5318761AJun 7, 1994
Process for preparing silicon carbide powder for use in semiconductor equipment
SUMITOMO METAL IND9 citations69