Inventor
CHUANG TZU-CHIN
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHUANG TZU-CHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
XEROX CORP
4 patentsUS5491347AFeb 13, 1996
Thin-film structure with dense array of binary control units for presenting images
XEROX CORP101 citations94
US5528082AJun 18, 1996
Thin-film structure with tapered feature
XEROX CORP34 citations91
US5518805AMay 21, 1996
Hillock-free multilayer metal lines for high performance thin film structures
XEROX CORP41 citations91
US5693983ADec 2, 1997
Thin-film structure with conductive molybdenum-chromium line
XEROX CORP7 citations72
KLA TENCOR TECH CORP
3 patentsUS7304302B1Dec 4, 2007
Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis
KLA TENCOR TECH CORP55 citations92
US7879730B2Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP11 citations81
US7709792B2May 4, 2010
Three-dimensional imaging using electron beam activated chemical etch
KLA TENCOR TECH CORP7 citations70