P

Inventor

OKAZAKI SHINJI

JP51 patents
⚠️ This page may combine multiple inventors who share the name “OKAZAKI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

28 patents
US5512328AApr 30, 1996

Method for forming a pattern and forming a thin film used in pattern formation

HITACHI LTD336 citations98
US5895741AApr 20, 1999

Photomask, manufacture of photomask, formation of pattern, manufacture of semiconductor device, and mask pattern design system

HITACHI LTD59 citations96
US5424173AJun 13, 1995

Electron beam lithography system and method

HITACHI LTD49 citations96
US5334282AAug 2, 1994

Electron beam lithography system and method

HITACHI LTD78 citations96
US5097138AMar 17, 1992

Electron beam lithography system and method

HITACHI LTD52 citations96
US4723903AFeb 9, 1988

Stamper for replicating high-density data recording disks

HITACHI LTD61 citations96
US5691115ANov 25, 1997

Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices

HITACHI LTD19 citations93
US5283440AFeb 1, 1994

Electron beam writing system used in a cell projection method

HITACHI LTD34 citations93
US4798470AJan 17, 1989

Pattern printing method and apparatus

HITACHI LTD37 citations93
US5757409AMay 26, 1998

Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus

HITACHI LTD25 citations92
US5700601ADec 23, 1997

Photomask, manufacture of photomask, formation of pattern, manufacture of semiconductor device, and mask pattern design system

HITACHI LTD40 citations92
US5621497AApr 15, 1997

Pattern forming method and projection exposure tool therefor

HITACHI LTD33 citations92
US5557314ASep 17, 1996

Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus

HITACHI LTD20 citations92
US5402410AMar 28, 1995

High density storage of information on a substrate with multiple depth and height

HITACHI LTD37 citations92
US5305364AApr 19, 1994

Projection type X-ray lithography apparatus

HITACHI LTD38 citations92
US5061599AOct 29, 1991

Radiation sensitive materials

HITACHI LTD26 citations92
US4729965AMar 8, 1988

Method of forming extrinsic base by diffusion from polysilicon/silicide source and emitter by lithography

HITACHI LTD39 citations92
US4315984AFeb 16, 1982

Method of producing a semiconductor device

HITACHI LTD43 citations92
US5250812AOct 5, 1993

Electron beam lithography using an aperture having an array of repeated unit patterns

HITACHI LTD25 citations90
US4403151ASep 6, 1983

Method of forming patterns

HITACHI LTD26 citations79
US6020109AFeb 1, 2000

Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices

HITACHI LTD11 citations74
US5902705AMay 11, 1999

Exposure method, aligner, and method manufacturing semiconductor integrated circuit devices

HITACHI LTD8 citations74
US5334845AAug 2, 1994

Charged beam exposure method and apparatus as well as aperture stop and production method thereof

HITACHI LTD8 citations74
US4983864AJan 8, 1991

Electronic beam drawing apparatus

HITACHI LTD10 citations74
US4307176ADec 22, 1981

Method of forming a pattern

HITACHI LTD11 citations73
US5932395AAug 3, 1999

Exposure method, aligner, and method manufacturing semiconductor integrated circuit devices

HITACHI LTD3 citations63
US4740693AApr 26, 1988

Electron beam pattern line width measurement system

HITACHI LTD4 citations63
US6525336B1Feb 25, 2003

Superfine electronic device and method for making same

HITACHI LTD3 citations62

SONY CORP

7 patents

TAIHO PHARMACEUTICAL CO LTD

4 patents

HITACHI HIGH TECH CORP

2 patents

GIGAPHOTON INC

2 patents

ISHIKAWAJIMA HARIMA HEAVY IND

1 patent

KAKIZAKI KOUJI

1 patent

SHIKOKU CHEM

1 patent

OKAI NOBUHIRO

1 patent

SUMITOMO WIRING SYSTEMS

1 patent

SOHDA YASUNARI

1 patent

NAT UNIV CORP YOKOHAMA NAT UNIV

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.