Inventor

TORIUMI MINORU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “TORIUMI MINORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US5512328AApr 30, 1996

Method for forming a pattern and forming a thin film used in pattern formation

HITACHI LTD336 citations98

US5621497AApr 15, 1997

Pattern forming method and projection exposure tool therefor

HITACHI LTD33 citations92

HITACHI CHEMICAL CO LTD

1 patent

US4792516ADec 20, 1988

Photosensitive composition

HITACHI CHEMICAL CO LTD17 citations72

SEMICONDUCTOR LEADING EDGE TEC

1 patent

US6803170B2Oct 12, 2004

Resist composition and method for manufacturing semiconductor device using the resist composition

SEMICONDUCTOR LEADING EDGE TEC6 citations58

TORIUMI MINORU

1 patent

US8163462B2Apr 24, 2012

Photosensitive composition, method for forming pattern, and method for manufacturing semiconductor device

TORIUMI MINORU3 citations53

EVOLVING NANO PROCESS INFRASTRUCTURE DEV CENTER INC

1 patent

US10095108B2Oct 9, 2018

Photosensitive composition and pattern formation method

EVOLVING NANO PROCESS INFRASTRUCTURE DEV CENTER INC0 citations41