Inventor
NAKASHITA KAZUHISA
JP9 patents
Patents
9 patentsUS5891764AApr 6, 1999
Laser processing apparatus and laser processing process
SEMICONDUCTOR ENERGY LAB147 citations99
US5643801AJul 1, 1997
Laser processing method and alignment
SEMICONDUCTOR ENERGY LAB160 citations99
US6638800B1Oct 28, 2003
Laser processing apparatus and laser processing process
SEMICONDUCTOR ENERGY LAB55 citations96
US5283087AFeb 1, 1994
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB25 citations92
US5079031AJan 7, 1992
Apparatus and method for forming thin films
SEMICONDUCTOR ENERGY LAB29 citations92
US5013688AMay 7, 1991
Method of manufacturing a semiconductor using plasma processing
SEMICONDUCTOR ENERGY LAB23 citations92
US4987004AJan 22, 1991
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB22 citations92
US4971667ANov 20, 1990
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB52 citations92
US5256483AOct 26, 1993
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB15 citations73