Inventor

STANTON STUART T

US6 patents

⚠️ This page may combine multiple inventors who share the name “STANTON STUART T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SVG LITHOGRAPHY SYSTEMS INC

2 patents

US5684566ANov 4, 1997

Illumination system and method employing a deformable mirror and diffractive optical elements

SVG LITHOGRAPHY SYSTEMS INC127 citations95

US6469793B1Oct 22, 2002

Multi-channel grating interference alignment sensor

SVG LITHOGRAPHY SYSTEMS INC41 citations90

AGERE SYSTEMS INC

2 patents

US6859324B2Feb 22, 2005

Optical demultiplexer/multiplexer architecture

AGERE SYSTEMS INC7 citations72

US7305333B2Dec 4, 2007

Projection electron beam lithography apparatus and method employing an estimator

AGERE SYSTEMS INC4 citations60

LUCENT TECHNOLOGIES INC

1 patent

US6528799B1Mar 4, 2003

Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems

LUCENT TECHNOLOGIES INC18 citations82

ELITH LLC

1 patent

US7050957B2May 23, 2006

Projection electron beam lithography apparatus and method employing an estimator

ELITH LLC5 citations66