Inventor
SEKI AKIHIRO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SEKI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
11 patentsUS6395446B1May 28, 2002
Resist compositions and patterning process
SHINETSU CHEMICAL CO24 citations92
US7344827B2Mar 18, 2008
Fine contact hole forming method employing thermal flow process
SHINETSU CHEMICAL CO10 citations84
US7252925B2Aug 7, 2007
Nitrogen-containing organic compound, resist composition and patterning process
SHINETSU CHEMICAL CO6 citations74
US6737214B2May 18, 2004
Chemical amplification resist compositions
SHINETSU CHEMICAL CO7 citations73
US7638260B2Dec 29, 2009
Positive resist compositions and patterning process
SHINETSU CHEMICAL CO2 citations63
US7618764B2Nov 17, 2009
Positive resist compositions and patterning process
SHINETSU CHEMICAL CO6 citations63
US11579529B2Feb 14, 2023
Positive resist composition and patterning process
SHINETSU CHEMICAL CO0 citations52
US9122155B2Sep 1, 2015
Sulfonium salt, resist composition and patterning process
SHINETSU CHEMICAL CO1 citations52
US8956803B2Feb 17, 2015
Sulfonium salt, resist composition, and patterning process
SHINETSU CHEMICAL CO0 citations52
US7494760B2Feb 24, 2009
Photoacid generators, chemically amplified resist compositions, and patterning process
SHINETSU CHEMICAL CO0 citations52
US9551932B2Jan 24, 2017
Patterning process and resist composition
SHINETSU CHEMICAL CO0 citations40