Inventor
NISHIUMI MASAHARU
JP7 patents
Patents
7 patentsUS5432315AJul 11, 1995
Plasma process apparatus including ground electrode with protection film
HITACHI LTD68 citations96
US5110408AMay 5, 1992
Process for etching
HITACHI LTD95 citations95
US4609426ASep 2, 1986
Method and apparatus for monitoring etching
HITACHI LTD63 citations94
US5290993AMar 1, 1994
Microwave plasma processing device
HITACHI LTD42 citations92
US4618398AOct 21, 1986
Dry etching method
HITACHI LTD36 citations91
US6046425AApr 4, 2000
Plasma processing apparatus having insulator disposed on inner surface of plasma generating chamber
HITACHI LTD10 citations74
US6754552B2Jun 22, 2004
Control apparatus for plasma utilizing equipment
HITACHI LTD11 citations73