Inventor
VAN DEN BRINK MARINUS A
NL8 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN BRINK MARINUS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM LITHOGRAPHY BV
5 patentsUS5144363ASep 1, 1992
Apparatus for and method of projecting a mask pattern on a substrate
ASM LITHOGRAPHY BV112 citations94
US6084673AJul 4, 2000
Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders
ASM LITHOGRAPHY BV49 citations92
US6067146AMay 23, 2000
Photolithographic apparatus
ASM LITHOGRAPHY BV14 citations71
US4746800AMay 24, 1988
Positioning device comprising a z-manipulator and a θ-manipulator
ASM LITHOGRAPHY BV16 citations69
US6239862B1May 29, 2001
Photolithographic apparatus
ASM LITHOGRAPHY BV4 citations60
ASM LITHOGRAPHY
3 patentsUS5801832ASep 1, 1998
Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes
ASM LITHOGRAPHY181 citations97
US5100237AMar 31, 1992
Apparatus for projecting a mask pattern on a substrate
ASM LITHOGRAPHY110 citations94
US5481362AJan 2, 1996
Apparatus for projecting a mask pattern on a substrate
ASM LITHOGRAPHY84 citations91